DocumentCode
2091306
Title
High-resolution EUV imaging using high harmonic generation
Author
Libertun, A.R. ; Zhang, X. ; Paul, A. ; Raymondson, D. ; Gershgoren, E. ; Gagnon, E. ; Backus, S. ; Murnane, M.M. ; Kapteyn, Henry C. ; Bartels, R.A. ; Liu, Y. ; Attwood, D.T.
Author_Institution
Colorado Univ., Boulder, CO
fYear
2004
fDate
21-21 May 2004
Firstpage
946
Lastpage
947
Abstract
We use a simple set-up consisting of two multilayer mirrors and a hollow fiber EUV light source to obtain high-resolution EUV images. Magnifications of X20 and X50 are demonstrated
Keywords
X-ray imaging; X-ray optics; mirrors; optical harmonic generation; optical multilayers; ultraviolet sources; EUV imaging; high harmonic generation; hollow fiber EUV light source; multilayer mirrors;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics Conference, 2004. (IQEC). International
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-778-4
Type
conf
Filename
1367082
Link To Document