• DocumentCode
    2091306
  • Title

    High-resolution EUV imaging using high harmonic generation

  • Author

    Libertun, A.R. ; Zhang, X. ; Paul, A. ; Raymondson, D. ; Gershgoren, E. ; Gagnon, E. ; Backus, S. ; Murnane, M.M. ; Kapteyn, Henry C. ; Bartels, R.A. ; Liu, Y. ; Attwood, D.T.

  • Author_Institution
    Colorado Univ., Boulder, CO
  • fYear
    2004
  • fDate
    21-21 May 2004
  • Firstpage
    946
  • Lastpage
    947
  • Abstract
    We use a simple set-up consisting of two multilayer mirrors and a hollow fiber EUV light source to obtain high-resolution EUV images. Magnifications of X20 and X50 are demonstrated
  • Keywords
    X-ray imaging; X-ray optics; mirrors; optical harmonic generation; optical multilayers; ultraviolet sources; EUV imaging; high harmonic generation; hollow fiber EUV light source; multilayer mirrors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Quantum Electronics Conference, 2004. (IQEC). International
  • Conference_Location
    San Francisco, CA
  • Print_ISBN
    1-55752-778-4
  • Type

    conf

  • Filename
    1367082