Title :
Improving the deployment of inspection tools; tutorial on inspection capacity and sample planning
Author :
Gudmundsson, Dadi ; Shanthikumar, J. George
Author_Institution :
Dept. of IEOR, California Univ., Berkeley, CA
Abstract :
To help fabs improve their use of inspection tools a practical guide to inspection capacity and sample planning is presented. A comprehensive approach involving data collection, parameter estimation, and model based sample planning is covered. The objective is to enable yield engineers to develop basic inspection planning toolboxes in a spreadsheet and/or more effectively manage inspection planning projects. For parameter estimation, the use and performance of a hidden Markov model and the E-M algorithm is introduced
Keywords :
hidden Markov models; inspection; integrated circuit manufacture; parameter estimation; planning; sampling methods; data collection; hidden Markov model; inspection capacity; inspection planning projects; inspection planning toolboxes; parameter estimation; sample planning; yield engineers; Capacity planning; Costs; Engineering management; Hidden Markov models; Inspection; Metrology; Parameter estimation; Project management; Semiconductor device manufacture; Tutorial;
Conference_Titel :
Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-9143-8
DOI :
10.1109/ISSM.2005.1513391
