Influence of non-uniform, surface mechanical loads over vibrational spectra of BAW piezoelectric resonators

Author

Crisan, Silviu ; Budura, Adrian ; Pop, Eugen

Author_Institution

Sch. of Inf. Technol. & Eng., Ottawa Univ., Ont., Canada

Volume

3

fYear

2000

fDate

2000

Firstpage

1394

Abstract

The correlation between the surface vibrational energy, the application point of the mechanical perturbation and the resonating frequency shift is analytically proved using Tiersten first order perturbation theory and a local one dimensional model for the estimation of the surface mechanical impedance. The simulation results are shown to be in a good concordance with the experimental results

Keywords

bulk acoustic wave devices; crystal resonators; digital simulation; perturbation theory; vibrations; AT quartz resonator; BAW piezoelectric resonators; Tiersten first order perturbation theory; elastic wire electrode; local onedimensional model; mechanical perturbation; resonating frequency shift; surface mechanical impedance; surface vibrational energy; vibrational spectra; Acoustic waves; Acoustical engineering; Electrodes; Information technology; Piezoelectric films; Resonant frequency; Solid modeling; Surface acoustic wave devices; Surface impedance; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 2000. IMTC 2000. Proceedings of the 17th IEEE

Conference_Location

Baltimore, MD

ISSN

1091-5281

Print_ISBN

0-7803-5890-2

Type

conf

DOI

10.1109/IMTC.2000.848704

Filename

848704