• DocumentCode
    2092238
  • Title

    Improvement of particle outbreak for chamber wall deterioration

  • Author

    Kawabata, Youichirou ; Watanabe, Munenori ; Ohtake, Koji ; Yajima, Teruo ; Endou, Minoru ; Aoyama, Masaaki ; Imaoka, Kazunori

  • Author_Institution
    Spansion LLC, Fukushima, Japan
  • fYear
    2005
  • fDate
    13-15 Sept. 2005
  • Firstpage
    483
  • Lastpage
    486
  • Abstract
    We used fault detect and classification (FDC) application to collect sensor´s data of tool. The origin of particles is specified by correlating the data with plasma parameters. We proved particles were caused by the deterioration of chamber wall. The deterioration is the coat of Al alumilite peels off from chamber wall. After recoating the coat of Al alumilite on chamber wall, the outbreak of particles reduced.
  • Keywords
    fault diagnosis; integrated circuit manufacture; sputter etching; alumilite; chamber wall deterioration; fault classification; fault detection; particle outbreak; Ceramics; Constitution; Data mining; Etching; Fault detection; Particle measurements; Plasma applications; Plasma measurements; Semiconductor devices; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
  • Print_ISBN
    0-7803-9143-8
  • Type

    conf

  • DOI
    10.1109/ISSM.2005.1513412
  • Filename
    1513412
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2092238