Micro confocal line scanning system for high density microfluidics

This paper describes development of a micro confocal line scanning system for multiplexed biochip applications. The hybrid integration of ID MEMS microlens scanner and confocal pinhole, laser diodes, and photodiode allows to create handheld sized autonomous confocal excitation and detection microsystem. Without use of bulky external microscopes, we have successfully demonstrated laser induced fluorescent excitation and detection from multiple of microfluidic channels using the micro confocal line scanning system.