Title :
Multiple layer asymmetric vertical comb-drive actuated scanning mirrors
Author :
McCormick, D.T. ; Tien, Norman C.
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Davis, CA, USA
Abstract :
A MEMS based, resonant mode, thinned single crystal silicon scanning mirror stiffened by a skeleton truss and actuated via multi-layer vertical comb-drives has been realized utilizing a self-aligned DRIE fabrication process.
Keywords :
biological techniques; elemental semiconductors; microactuators; mirrors; optical fabrication; optical scanners; silicon; sputter etching; MEMS; Si; multiple layer asymmetric vertical comb-drive; resonant mode; scanning mirrors; self-aligned DRIE fabrication; skeleton truss; thinned single crystal silicon; Actuators; Etching; Fabrication; Fingers; Micromechanical devices; Mirrors; Resonance; Silicon; Skeleton; Spine;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233443
