• DocumentCode
    2092817
  • Title

    A two-axis electrothermal SCS micromirror for biomedical imaging

  • Author

    Jain, Ankur ; Xie, Tuqiang ; Pan, Yingtian ; Fedder, Gary K. ; Xie, Huikai

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Florida Univ., Gainesville, FL, USA
  • fYear
    2003
  • fDate
    18-21 Aug. 2003
  • Firstpage
    14
  • Lastpage
    15
  • Abstract
    This paper reports a 1 mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated micromirror with large scanning angle (up to 40°), which can be used for biomedical imaging. The micromirror is fabricated by a deep-reactive-ion-etch post-CMOS micromachining process.
  • Keywords
    aluminium; biological techniques; biomedical optical imaging; elemental semiconductors; micromachining; micromechanical devices; micromirrors; optical fabrication; optical films; silicon; sputter etching; Si-Al; aluminum-coated micromirror; biomedical imaging; deep-reactive-ion-etch post-CMOS micromachining; electrothermal SCS micromirror; single-crystalline-silicon; two-axis SCS micromirror; Actuators; Biomedical engineering; Biomedical imaging; Biomedical optical imaging; Electrothermal effects; Etching; Micromirrors; Microstructure; Mirrors; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS, 2003 IEEE/LEOS International Conference on
  • Print_ISBN
    0-7803-7830-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2003.1233444
  • Filename
    1233444
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2092817