Title :
A two-axis electrothermal SCS micromirror for biomedical imaging
Author :
Jain, Ankur ; Xie, Tuqiang ; Pan, Yingtian ; Fedder, Gary K. ; Xie, Huikai
Author_Institution :
Dept. of Electr. & Comput. Eng., Florida Univ., Gainesville, FL, USA
Abstract :
This paper reports a 1 mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated micromirror with large scanning angle (up to 40°), which can be used for biomedical imaging. The micromirror is fabricated by a deep-reactive-ion-etch post-CMOS micromachining process.
Keywords :
aluminium; biological techniques; biomedical optical imaging; elemental semiconductors; micromachining; micromechanical devices; micromirrors; optical fabrication; optical films; silicon; sputter etching; Si-Al; aluminum-coated micromirror; biomedical imaging; deep-reactive-ion-etch post-CMOS micromachining; electrothermal SCS micromirror; single-crystalline-silicon; two-axis SCS micromirror; Actuators; Biomedical engineering; Biomedical imaging; Biomedical optical imaging; Electrothermal effects; Etching; Micromirrors; Microstructure; Mirrors; Substrates;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233444
