Title :
Micromachined acoustic sensors with integrated optoelectronic readout
Author :
Degettekin, F.L. ; Hall, Neal A. ; Lee, W.
Author_Institution :
G.W. Woodruff Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
A diffraction-based optical displacement detection method that enables integration of optoelectronics with micromachined acoustic structures in a small volume is described. Coupled with electrostatic actuation, the method is used to implement broadband (DC-200 kHz) micromachined microphones and microphone arrays with self-calibration capabilities as well as ultrasonic transmit-receive arrays operating in air into the MHz frequency range.
Keywords :
calibration; diffraction gratings; electrostatic actuators; integrated optoelectronics; micromachining; microphones; microsensors; optical signal detection; ultrasonic transducer arrays; 200 kHz; MHz frequency range; broadband micromachined microphones; diffraction-based optical displacement detection; electrostatic actuation; integrated optoelectronic readout; micromachined acoustic sensors; microphone arrays; self-calibration capabilities; ultrasonic transmit-receive arrays; Acoustic diffraction; Acoustic sensors; Acoustic signal detection; Electrostatic actuators; Integrated optics; Integrated optoelectronics; Microphone arrays; Optical detectors; Optical diffraction; Optical sensors;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233445
