Replicated optical MEMS in sol-gel materials

Author

Gale, Michael T. ; Obi, Samuel ; De Rooij, Nico

Author_Institution

Centre Suisse d´´Electronique et de Microtechnique SA, Zurich, Switzerland

fYear

2003

fDate

18-21 Aug. 2003

Firstpage

20

Lastpage

21

Abstract

Replication technology using sol-gel materials offers an interesting alternative to the current approach to optical MEMS fabricated in silicon using lithographic and micro-machining technologies. The use of UV-curable sol-gel materials enables optical features such as micro-lenses and diffractive optical elements to be fabricated in the same process step as the MEMS structures, and has the potential of low-cost, high resolution mass-production technology. The paper describes progress in work aimed at investigating the potential of this approach.

Keywords

diffractive optical elements; microlenses; micromechanical devices; optical fabrication; optical materials; organic-inorganic hybrid materials; replica techniques; UV- curable sol-gel materials; diffractive optical elements; lithographic technologies; micro-lenses; micromachining technologies; optical MEMS; replication technology; silicon; sol-gel materials; Glass; Lithography; Micromechanical devices; Microstructure; Nanostructured materials; Optical device fabrication; Optical films; Optical materials; Optical polymers; Semiconductor materials;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2003 IEEE/LEOS International Conference on

Print_ISBN

0-7803-7830-X

Type

conf

DOI

10.1109/OMEMS.2003.1233447

Filename

1233447