Application of set membership identification for fault detection of MEMS

Author

Reppa, Vasso ; Tzes, Anthony

Author_Institution

Dept. of Electr. & Comput. Eng., Patras Univ., Achaia

fYear

2006

fDate

15-19 May 2006

Firstpage

643

Lastpage

648

Abstract

In this article, a set membership (SM) identification technique is tailored to detect faults in microelectromechanical systems. The SM-identifier estimates an orthotope which contains the system´s parameter vector. Based on this orthotope, the system´s output interval is predicted. If the actual output is outside of this interval, then a fault is detected. Utilization of this scheme can discriminate mechanical-component faults from electronic component variations frequently encountered in MEMS. For testing the suggested algorithm´s performance in simulation studies, an interface between classical control-software (MATLAB) and circuit emulation (HSPICE) is developed

Keywords

SPICE; control engineering computing; fault diagnosis; mechanical engineering computing; micromechanical devices; MEMS; circuit emulation; classical control-software; fault detection; mechanical-component faults; microelectromechanical systems; set membership identification technique; Circuit faults; Circuit simulation; Circuit testing; Electrical fault detection; Electronic components; Fault detection; Fault diagnosis; Microelectromechanical systems; Micromechanical devices; Samarium;

fLanguage

English

Publisher

ieee

Conference_Titel

Robotics and Automation, 2006. ICRA 2006. Proceedings 2006 IEEE International Conference on

Conference_Location

Orlando, FL

ISSN

1050-4729

Print_ISBN

0-7803-9505-0

Type

conf

DOI

10.1109/ROBOT.2006.1641783

Filename

1641783