DocumentCode
2093076
Title
Design, development and experiments of a high stroke-precision 2DoF (linear-angular) microsystem
Author
Rakotondrabe, Micky ; Haddab, Yassine ; Lutz, Philippe
Author_Institution
Lab. d´´Automatique de Besancon, Univ. de Franche-Comte, Besancon
fYear
2006
fDate
15-19 May 2006
Firstpage
669
Lastpage
674
Abstract
This paper presents the design, the development and the experiments on a two degrees of freedom (2DoF) microsystem. The originality of the microsystem is its ability to do angular and linear motions independently with a very high stroke and a submicrometric precision. The target performances are first presented. Afterwards the stick-slip piezoelectric microactuators that are used are presented. Then, their integration inside the microsystem is detailed. Finally, results of experiments are given
Keywords
microactuators; micromanipulators; angular motions; high stroke-precision; high stroke-precision microsystem; linear motions; micromanipulation system; stick-slip piezoelectric microactuators; Adhesives; Assembly systems; Electrodes; Microactuators; Microelectromechanical systems; Micromechanical devices; Physics; Piezoelectric actuators; Production; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Robotics and Automation, 2006. ICRA 2006. Proceedings 2006 IEEE International Conference on
Conference_Location
Orlando, FL
ISSN
1050-4729
Print_ISBN
0-7803-9505-0
Type
conf
DOI
10.1109/ROBOT.2006.1641787
Filename
1641787
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