Title :
A MEMS-actuated tunable microdisk resonator
Author :
Lee, Ming-Chang M. ; Wu, Ming C.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
A novel tunable microdisk resonator with integrated MEMS actuator to alter coupling gap is proposed and experimentally demonstrated for the first time. The fabricated device shows a transmittance change about 8 dB and a quality factor of 6200.
Keywords :
integrated optics; micro-optics; microactuators; microcavities; optical fabrication; optical resonators; optical tuning; integrated MEMS actuator; transmittance; tunable microdisk resonator; Actuators; Coupling circuits; Fabrication; Micromechanical devices; Optical resonators; Optical waveguides; Resonator filters; Tunable circuits and devices; Waveguide discontinuities; Wavelength division multiplexing;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233451
