• DocumentCode
    2093095
  • Title

    A MEMS-actuated tunable microdisk resonator

  • Author

    Lee, Ming-Chang M. ; Wu, Ming C.

  • Author_Institution
    Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
  • fYear
    2003
  • fDate
    18-21 Aug. 2003
  • Firstpage
    28
  • Lastpage
    29
  • Abstract
    A novel tunable microdisk resonator with integrated MEMS actuator to alter coupling gap is proposed and experimentally demonstrated for the first time. The fabricated device shows a transmittance change about 8 dB and a quality factor of 6200.
  • Keywords
    integrated optics; micro-optics; microactuators; microcavities; optical fabrication; optical resonators; optical tuning; integrated MEMS actuator; transmittance; tunable microdisk resonator; Actuators; Coupling circuits; Fabrication; Micromechanical devices; Optical resonators; Optical waveguides; Resonator filters; Tunable circuits and devices; Waveguide discontinuities; Wavelength division multiplexing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS, 2003 IEEE/LEOS International Conference on
  • Print_ISBN
    0-7803-7830-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2003.1233451
  • Filename
    1233451
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2093095