Title :
Configurable spectral filter with an array of diffraction grating
Author :
Sagberg, Håkon ; Lacolle, M. ; Johansen, Ib-Rune ; Løvhaugen, Odd ; Solgaard, Olav ; Sudbø, Aasmund S.
Author_Institution :
Dept. of Phys., Oslo Univ., Norway
Abstract :
This paper presents the design, fabrication, and characterization of a configurable diffractive filter capable of high optical resolution within a narrow spectral range. Based on measurements of spectral reflectance from this device, and from corresponding set of fixed diffractive elements, this type of spectral filter is well suited for spectroscopy applications.
Keywords :
diffraction gratings; micro-optics; micromechanical devices; optical arrays; optical design techniques; optical fabrication; optical filters; optical testing; reflectivity; configurable spectral filter; diffraction grating array; fixed diffractive elements; spectral reflectance; spectroscopy applications; Cybernetics; Diffraction gratings; Etching; Filters; Laboratories; Micromechanical devices; Phased arrays; Physics; Silicon; Wavelength measurement;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233453
