DocumentCode
2093112
Title
Configurable spectral filter with an array of diffraction grating
Author
Sagberg, Håkon ; Lacolle, M. ; Johansen, Ib-Rune ; Løvhaugen, Odd ; Solgaard, Olav ; Sudbø, Aasmund S.
Author_Institution
Dept. of Phys., Oslo Univ., Norway
fYear
2003
fDate
18-21 Aug. 2003
Firstpage
30
Lastpage
31
Abstract
This paper presents the design, fabrication, and characterization of a configurable diffractive filter capable of high optical resolution within a narrow spectral range. Based on measurements of spectral reflectance from this device, and from corresponding set of fixed diffractive elements, this type of spectral filter is well suited for spectroscopy applications.
Keywords
diffraction gratings; micro-optics; micromechanical devices; optical arrays; optical design techniques; optical fabrication; optical filters; optical testing; reflectivity; configurable spectral filter; diffraction grating array; fixed diffractive elements; spectral reflectance; spectroscopy applications; Cybernetics; Diffraction gratings; Etching; Filters; Laboratories; Micromechanical devices; Phased arrays; Physics; Silicon; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN
0-7803-7830-X
Type
conf
DOI
10.1109/OMEMS.2003.1233453
Filename
1233453
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