Electrostatically actuated micro-fluidic optical cross-connect switch

An electrostatically actuated micro-fluidic OXC switch based on PLC and MEMS technologies has been developed. The motion of the fluid is controlled by the displacement of a mechanical diaphragm driven by an electrostatic actuator in order to ensure low power consumption and enhanced reliability. Specific technological developments have been made for the fabrication of 2 × 2 and 8 × 8 switches, in particular in the assembly of the two wafers and for the release process. The approach has bee validated by the good optical results obtained on test devices and the good mechanical behaviour of the membranes. Further characterisations will be performed on 8 × 8 and 32 × 32 switches and will benefit on complementary developments that are still on progress in particular fluid filling.