• DocumentCode
    2093367
  • Title

    A multi-step DRIE process for a 128 × 128 micromirror array

  • Author

    Kouma, Norinao ; Tsuboi, Osamu ; Mizuno, Yoshihiro ; Okuda, Hisao ; Mi, Xiaoyu ; Iwaki, Masafumi ; Soneda, Hiromitsu ; Ueda, Satoshi ; Sawaki, Ippei

  • Author_Institution
    Fujitsu Labs. Ltd., Akashi, Japan
  • fYear
    2003
  • fDate
    18-21 Aug. 2003
  • Firstpage
    53
  • Lastpage
    54
  • Abstract
    A multi-step DRIE process for fabricating a vertical comb-driven micromirror array with five different heights was developed. This process was used to fabricate a dual-axis 128 × 128 micromirror array with a high resonance frequency.
  • Keywords
    micromechanical devices; micromirrors; optical arrays; optical fabrication; optical testing; photonic switching systems; sputter etching; 128 × 128 micromirror array; high resonance frequency; multi-step DRIE process; optical fabrication; vertical comb-driven micromirror array; Bars; Etching; Fabrication; Micromirrors; Microswitches; Mirrors; Optical arrays; Resists; Silicon; Teeth;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS, 2003 IEEE/LEOS International Conference on
  • Print_ISBN
    0-7803-7830-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2003.1233463
  • Filename
    1233463
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2093367