Title :
A multi-step DRIE process for a 128 × 128 micromirror array
Author :
Kouma, Norinao ; Tsuboi, Osamu ; Mizuno, Yoshihiro ; Okuda, Hisao ; Mi, Xiaoyu ; Iwaki, Masafumi ; Soneda, Hiromitsu ; Ueda, Satoshi ; Sawaki, Ippei
Author_Institution :
Fujitsu Labs. Ltd., Akashi, Japan
Abstract :
A multi-step DRIE process for fabricating a vertical comb-driven micromirror array with five different heights was developed. This process was used to fabricate a dual-axis 128 × 128 micromirror array with a high resonance frequency.
Keywords :
micromechanical devices; micromirrors; optical arrays; optical fabrication; optical testing; photonic switching systems; sputter etching; 128 × 128 micromirror array; high resonance frequency; multi-step DRIE process; optical fabrication; vertical comb-driven micromirror array; Bars; Etching; Fabrication; Micromirrors; Microswitches; Mirrors; Optical arrays; Resists; Silicon; Teeth;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233463
