Title :
Temperature stability of the frequency of a resonant micro scanning mirror
Author :
Wolter, A. ; Korth, H. ; Schenk, H. ; Lakner, H.
Author_Institution :
Fraunhofer-Inst. Photonische Mikrosysteme, Dresden, Germany
Abstract :
Investigation of our bulk-micromachined resonant micro MEMS-scanner revealed that the eigen-frequency of 250 Hz varied within a range of only 0.1% during a temperature cycle between 10°C and 60°C at ambient atmosphere. Results of the study show that packaging is crucial.
Keywords :
micromechanical devices; micromirrors; optical scanners; optical testing; packaging; thermal stability; 10 to 60 degC; 250 Hz; bulk-micromachined MEMS-scanner; eigenfrequency; resonant micro MEMS-scanner; resonant micro scanning mirror; temperature stability; Ceramics; Mirrors; Packaging; Resonance; Resonant frequency; Silicon; Stability; Temperature; Thermal stresses; Voltage;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233464
