Title :
An integrated fabrication of sol-gel derived PZT thick films and SOI for 2D optical micromirror
Author :
Tsaur, Jiunnjye ; Kobayashi, Takeshi ; Ichiki, Masaaki ; Maeda, Ryutaro ; Suga, Tadatomo
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol., Japan
Abstract :
This paper aims to improve the sol-gel process and demonstrate the integrated fabrication with the use of SOI wafers. The piezoelectric properties of the PZT and the silicon-based micromirror with a plane structure are also presented.
Keywords :
integrated optics; micromechanical devices; micromirrors; optical fabrication; piezoelectric devices; silicon-on-insulator; sol-gel processing; thick films; 2D optical micromirror; PZT; SOI; Si; integrated fabrication; piezoelectric properties; silicon-based micromirror; sol-gel derived PZT thick films; sol-gel process; Electrodes; Integrated optics; Micromirrors; Mirrors; Optical device fabrication; Optical devices; Optical films; Piezoelectric actuators; Polarization; Thick films;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233465
