DocumentCode
2093427
Title
An integrated fabrication of sol-gel derived PZT thick films and SOI for 2D optical micromirror
Author
Tsaur, Jiunnjye ; Kobayashi, Takeshi ; Ichiki, Masaaki ; Maeda, Ryutaro ; Suga, Tadatomo
Author_Institution
Nat. Inst. of Adv. Ind. Sci. & Technol., Japan
fYear
2003
fDate
18-21 Aug. 2003
Firstpage
57
Lastpage
58
Abstract
This paper aims to improve the sol-gel process and demonstrate the integrated fabrication with the use of SOI wafers. The piezoelectric properties of the PZT and the silicon-based micromirror with a plane structure are also presented.
Keywords
integrated optics; micromechanical devices; micromirrors; optical fabrication; piezoelectric devices; silicon-on-insulator; sol-gel processing; thick films; 2D optical micromirror; PZT; SOI; Si; integrated fabrication; piezoelectric properties; silicon-based micromirror; sol-gel derived PZT thick films; sol-gel process; Electrodes; Integrated optics; Micromirrors; Mirrors; Optical device fabrication; Optical devices; Optical films; Piezoelectric actuators; Polarization; Thick films;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN
0-7803-7830-X
Type
conf
DOI
10.1109/OMEMS.2003.1233465
Filename
1233465
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