DocumentCode
2093446
Title
High performance low cost microphones utilising micro-optical technology
Author
Fismen, B.G. ; Sagberg, H. ; Johansen, I.-R. ; Bakke, KA H.
Author_Institution
SINTEF, Oslo, Norway
fYear
2003
fDate
18-21 Aug. 2003
Firstpage
59
Lastpage
60
Abstract
Two micro-optical microphone principles have been realised. The first is based on a self-aligning Fabry-Perot cavity with a LED. The second is based on a diffractive lens, a reflecting membrane and a fiber.
Keywords
Fabry-Perot resonators; lenses; light emitting diodes; membranes; micro-optics; microphones; optical fibres; LED; diffractive lens; fiber; micro-optical technology; microphones; reflecting membrane; self-aligning Fabry-Perot cavity; Biomembranes; Costs; Detectors; Fabry-Perot; Lenses; Light emitting diodes; Microphones; Optical sensors; Optical surface waves; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN
0-7803-7830-X
Type
conf
DOI
10.1109/OMEMS.2003.1233466
Filename
1233466
Link To Document