A miniaturized SNOM sensor based on the optical feedback inside the VCSEL cavity

An integrated architecture for SNOM sensor is proposed. The basic design consists of a transparent cantilever with a VCSEL bonded by flip-chip beneath the metalized tip. An aperture in the metalization layer at the apex is illuminated by the VCSEL and the light beam back reflected is detected with a detector integrated on the back of the VCSEL. The study also presents excellent quality optical images, demonstrating the performance of SNOM sensor and justifying the interest of integrated architecture.