Title :
The study on SU-8 micro cylindrical lens for laser induced fluorescence application
Author :
Hsieh, Jerwei ; Weng, Chun-Jen ; Lin, Hui-Hsiung ; Yin, Hung-Ling ; Hu, Joseph Y C ; Chou, Hsiao-Yu ; Lai, Cheng-Fung ; Fang, Weileun
Author_Institution :
Precision Intsrum. Dev. Center, Taiwan
Abstract :
In this study, a new method to realize both v-MCL (micro cylindrical lens) and h-MCL using SU-8 as lens material is demonstrated. The characterization results showed that SU-8 MCLs could not only have acceptable optical quality but function well for collimating and focusing. The advantages of fast prototyping and easy integrating of SU-8 MCLs would make itself a useful tool in many applications.
Keywords :
fluorescence; laser beam applications; microlenses; optical collimators; optical focusing; optical materials; optical testing; SU-8 micro cylindrical lens; collimating; focusing; laser induced fluorescence; lens material; Biological materials; Fluorescence; Laser applications; Lenses; Optical design; Optical device fabrication; Optical materials; Refractive index; Stability; Thermal resistance;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233469
