Title :
Constructing optical microsystems based on the hydrophobic effect: comparison of microlens arrays fabricated by different methods
Author :
Zimmer, Fabian ; Moench, Wolfgang ; Zappe, Hans
Author_Institution :
Inst. for Microsystem Technol., Freiburg Univ., Freiberg, Germany
Abstract :
We report on strategies to form polymer microstructures on patterned substrates using the hydrophobic effect for fabrication of optical microsystems. We compare three different liquid phase dewetting methods by the example of microlens arrays.
Keywords :
microlenses; micromechanical devices; optical arrays; optical fabrication; optical polymers; hydrophobic effect; liquid phase dewetting methods; microlens arrays; optical fabrication; optical microsystems; patterned substrates; polymer microstructures; Lenses; Microoptics; Optical arrays; Optical device fabrication; Optical interferometry; Optical polymers; Optical refraction; Optical sensors; Optical surface waves; Soft lithography;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233471
