DocumentCode
2093572
Title
Constructing optical microsystems based on the hydrophobic effect: comparison of microlens arrays fabricated by different methods
Author
Zimmer, Fabian ; Moench, Wolfgang ; Zappe, Hans
Author_Institution
Inst. for Microsystem Technol., Freiburg Univ., Freiberg, Germany
fYear
2003
fDate
18-21 Aug. 2003
Firstpage
69
Lastpage
70
Abstract
We report on strategies to form polymer microstructures on patterned substrates using the hydrophobic effect for fabrication of optical microsystems. We compare three different liquid phase dewetting methods by the example of microlens arrays.
Keywords
microlenses; micromechanical devices; optical arrays; optical fabrication; optical polymers; hydrophobic effect; liquid phase dewetting methods; microlens arrays; optical fabrication; optical microsystems; patterned substrates; polymer microstructures; Lenses; Microoptics; Optical arrays; Optical device fabrication; Optical interferometry; Optical polymers; Optical refraction; Optical sensors; Optical surface waves; Soft lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN
0-7803-7830-X
Type
conf
DOI
10.1109/OMEMS.2003.1233471
Filename
1233471
Link To Document