Title :
Crystalline Si-based in-plane tunable Fabry-Perot filter with wide tunable range
Author :
Yun, Sung-Sik ; Jo, Kyoung-Woo ; Lee, Jong-Hyun
Author_Institution :
Dept. of Mechatronics, K-JIST, Gwangju, South Korea
Abstract :
This paper presents crystalline Si-based tunable Fabry-Perot filter, which enables its integration to align with other optical devices on an in-plane substrate. This device features wide tuning range over 80 nm and high tuning sensitivity of 11.7 nm/V.
Keywords :
elemental semiconductors; integrated optics; optical communication equipment; optical filters; optical testing; optical tuning; silicon; wavelength division multiplexing; Si; crystalline Si-based Fabry-Perot filter; in-plane substrate; tunable Fabry-Perot filter; Crystallization; Fabry-Perot; Mirrors; Optical fiber filters; Optical filters; Optical resonators; Optical sensors; Optical tuning; Reflectivity; Resonator filters;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233475
