3D MEMS antenna for IR sensor using novel UV-lithography, plastic micromachining and mesh structure bonding technique

Author

Park, Jong-yeon ; Kim, Kun-tae ; Moon, Sung ; Pak, James Jungho

Author_Institution

Microsystem Res. Center, Korea Inst. of Sci. & Technol., Seoul, South Korea

fYear

2003

fDate

18-21 Aug. 2003

Firstpage

79

Lastpage

80

Abstract

This paper describes the novel UV-lithography technique for fabrication of 3D feed horn mold structure array using implementation of mirror reflected parallel beam illuminator (MRPBI) system, fabrication of 3D feed horn MEMS antenna´s plate using plastic micromachining (PMM) by polydimethylsiloxane (PDMS) and the 3D MEMS antenna array are assembled using novel 3D MEMS bonding technique by mesh structure bonding (MSB) method.

Keywords

antenna arrays; bonding processes; micromachining; microsensors; mirrors; optical fabrication; photolithography; polymers; ultraviolet detectors; 3D MEMS antenna; 3D feed horn mold structure array; IR sensor; UV-lithography; mesh structure bonding; mirror reflected parallel beam illuminator; plastic micromachining; polydimethylsiloxane; Antenna arrays; Bonding; Fabrication; Feeds; Horn antennas; Infrared sensors; Micromachining; Micromechanical devices; Plastics; Reflector antennas;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2003 IEEE/LEOS International Conference on

Print_ISBN

0-7803-7830-X

Type

conf

DOI

10.1109/OMEMS.2003.1233476

Filename

1233476