Title :
3D MEMS antenna for IR sensor using novel UV-lithography, plastic micromachining and mesh structure bonding technique
Author :
Park, Jong-yeon ; Kim, Kun-tae ; Moon, Sung ; Pak, James Jungho
Author_Institution :
Microsystem Res. Center, Korea Inst. of Sci. & Technol., Seoul, South Korea
Abstract :
This paper describes the novel UV-lithography technique for fabrication of 3D feed horn mold structure array using implementation of mirror reflected parallel beam illuminator (MRPBI) system, fabrication of 3D feed horn MEMS antenna´s plate using plastic micromachining (PMM) by polydimethylsiloxane (PDMS) and the 3D MEMS antenna array are assembled using novel 3D MEMS bonding technique by mesh structure bonding (MSB) method.
Keywords :
antenna arrays; bonding processes; micromachining; microsensors; mirrors; optical fabrication; photolithography; polymers; ultraviolet detectors; 3D MEMS antenna; 3D feed horn mold structure array; IR sensor; UV-lithography; mesh structure bonding; mirror reflected parallel beam illuminator; plastic micromachining; polydimethylsiloxane; Antenna arrays; Bonding; Fabrication; Feeds; Horn antennas; Infrared sensors; Micromachining; Micromechanical devices; Plastics; Reflector antennas;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233476
