• DocumentCode
    2093734
  • Title

    Nonlinear torque compensation of comb-driven micromirror

  • Author

    Sakai, Y. ; Yamabana, T. ; Ide, S. ; Mori, K. ; Ishizuka, A. ; Tsuboi, O. ; Matsuyama, Takashi ; Ishii, Y. ; Kawai, M.

  • Author_Institution
    Fujitsu Labs. Ltd., Atsugi, Japan
  • fYear
    2003
  • fDate
    18-21 Aug. 2003
  • Firstpage
    83
  • Lastpage
    84
  • Abstract
    We achieved high-speed (i.e., less than 1 ms) angle response without resonance by applying the nonlinear torque compensation of a comb-driven micromirror to a feed-forward controller.
  • Keywords
    compensation; micromirrors; torque control; comb-driven micromirror; feed-forward controller; nonlinear torque compensation; Capacitance; Circuit simulation; Feedback control; Micromirrors; Mirrors; Nonlinear distortion; Optical switches; Resonance; Torque control; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS, 2003 IEEE/LEOS International Conference on
  • Print_ISBN
    0-7803-7830-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2003.1233478
  • Filename
    1233478
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2093734