Title :
Electrostrictive elastomer based diffractive modulator for use as a variable optical attenuator
Author :
Uma, Srinivasan ; Matusiak, Robert ; Hecht, David L. ; Shrader, Eric J.
Author_Institution :
Device Hardware Lab., Palo Alto Res. Center Inc., CA, USA
Abstract :
Device structure and measurements on an elastomer based MEMS modulator is reported. The configurable reflective phase grating responds to voltage and the surface corrugates to a sinusoidal pattern enabling analog control of the diffracted intensity.
Keywords :
diffraction gratings; elastomers; micro-optics; micromechanical devices; optical attenuators; optical communication equipment; optical modulation; optical variables measurement; MEMS modulator; diffractive modulator; electrostrictive elastomer; reflective phase grating; variable optical attenuator; Corrugated surfaces; Electrodes; Electrostriction; Optical attenuators; Optical control; Optical diffraction; Optical interferometry; Optical modulation; Optical receivers; Optical surface waves;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233479
