DocumentCode
2093743
Title
Electrostrictive elastomer based diffractive modulator for use as a variable optical attenuator
Author
Uma, Srinivasan ; Matusiak, Robert ; Hecht, David L. ; Shrader, Eric J.
Author_Institution
Device Hardware Lab., Palo Alto Res. Center Inc., CA, USA
fYear
2003
fDate
18-21 Aug. 2003
Firstpage
85
Lastpage
86
Abstract
Device structure and measurements on an elastomer based MEMS modulator is reported. The configurable reflective phase grating responds to voltage and the surface corrugates to a sinusoidal pattern enabling analog control of the diffracted intensity.
Keywords
diffraction gratings; elastomers; micro-optics; micromechanical devices; optical attenuators; optical communication equipment; optical modulation; optical variables measurement; MEMS modulator; diffractive modulator; electrostrictive elastomer; reflective phase grating; variable optical attenuator; Corrugated surfaces; Electrodes; Electrostriction; Optical attenuators; Optical control; Optical diffraction; Optical interferometry; Optical modulation; Optical receivers; Optical surface waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN
0-7803-7830-X
Type
conf
DOI
10.1109/OMEMS.2003.1233479
Filename
1233479
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