Title :
Fringe-field-activated SOI tilting mirrors
Author :
Greywall, Dennis S. ; Pai, Chien-Shing ; Oh, Sang-Hyun ; Chang, Chorng-Ping ; Marom, Dan M. ; Stanton, Stuart ; Busch, Paul A. ; Cirelli, Raymond A. ; Taylor, J. Ashley ; Klemens, Fred P. ; Sorsch, Thomas W. ; Bower, J. Eric ; Lai, Warren Y C ; Soh, Hyong
Author_Institution :
Lucent Technol. Bell Labs, Murray Hill, NJ, USA
Abstract :
This paper discusses a significant improvement of the SOI process that can be implemented in various manners and that remedies many problems of earlier fabrication schemes. In particular the new MOEMS structures are monolithic, do not exhibit rotational snapdown, have electrical shielding between channels, and have activation voltages less than or comparable to parallel plate devices. The approach is discussed in terms of an application requiring a linear array of closely-spaced cantilever mirrors.
Keywords :
micromechanical devices; micromirrors; optical arrays; optical fabrication; silicon-on-insulator; MOEMS; SOI tilting mirrors; Si; cantilever mirrors; fringe-field-activated mirrors; linear array; monolithic structures; Dielectric substrates; Electrodes; Electrostatics; Etching; Micromechanical devices; Mirrors; Research and development; Silicon; Springs; Voltage;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233482
