Title :
A 2D scanner by surface and bulk micromachined vertical comb actuators
Author :
Piyawattanametha, Wibool ; Patterson, Pamela R. ; Hah, Dooyoung ; Toshiyoshi, Hiroshi ; Wu, Ming C.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
We present the design, fabrication, and demonstration of a fully decoupled 2D gimbal scanner with angular vertical comb (AVC) actuators. The device is realized by combining a foundry surface-micromachining process (MUMPs) with a 3-mask deep-reactive-ion- etching (DRIE) post process. Surface-micromachining provides versatile mechanical design and electrical interconnect while bulk micromachining offers flat micromirrors and high-force actuators. The scanner achieves DC mechanical scanning ranges of ±6.2° (at 55 Vdc) and ±4.1° (at 50 Vdc) for the inner and outer gimbals, respectively. The 1-mm mirror has a radius of curvature of 40 cm.
Keywords :
electrostatic actuators; micromachining; micromirrors; optical design techniques; optical fabrication; optical scanners; sputter etching; 1 mm; 2D gimbal scanner; 2D scanner; 3-mask deep-reactive-ion-etching; 50 V; 55 V; DC mechanical scanning; bulk micromachining; electrical interconnect; flat micromirrors; high-force actuators; mechanical design; surface-micromachining; vertical comb actuators; Actuators; Automatic voltage control; Etching; Fabrication; Fingers; Foundries; Micromachining; Micromirrors; Mirrors; Springs;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233483
