Title :
Cascaded micromirror pair driven by angular vertical combs for two-axis scanning
Author :
Fujino, Makoto ; Patterson, Pamela R. ; Nguyen, Hung ; Piyawattanametha, Wibool ; Wu, Ming C.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
Monolithically cascaded one-axis micromirrors driven by angular vertical combs are designed and fabricated. Using "W"-shape ray optics, we demonstrate two-axis scanning covering ±6.0° two-dimensional area at resonant modes: 7.5 kHz, ±17 V in fast-scanning mirror, 1.2 kHz, ±7 V in slow-scanning mirror.
Keywords :
electrostatic actuators; micromirrors; optical design techniques; optical fabrication; optical scanners; ray tracing; -17 to 17 V; -7 to 7 V; 1.2 kHz; 7.5 kHz; W-shape ray optics; angular vertical combs; cascaded micromirror pair; resonant modes; scanning mirror; two-axis scanning; Fabrication; Fasteners; Fingers; Micromirrors; Mirrors; Optical films; Optical polymers; Resonance; Resonant frequency; Voltage;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233486
