Title :
Photonic crystal waveguide characterisation for MEMS applications
Author :
Salt, Martin G. ; Maerki, I. ; Gautsch, S. ; Schaedlin, F. ; Staufer, U. ; Herzig, H.P.
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ., Switzerland
Abstract :
This work deals with the performance of silicon photonic crystal waveguides (∼ 1.55 μm). Initial results are presented and concepts for future MEMS-based devices are introduced.
Keywords :
elemental semiconductors; micro-optics; micromechanical devices; optical testing; optical waveguide theory; photonic crystals; silicon; MEMS applications; MEMS-based devices; photonic crystal waveguide; silicon photonic crystal waveguides; Biomembranes; Dispersion; Interference; Micromechanical devices; Optical filters; Optical losses; Optical reflection; Optical waveguides; Photonic crystals; Silicon;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233490
