Title :
Fabrication and some measurement of a digital variable optical attenuator
Author :
Sun, W. ; Munghal, M.J. ; Noell, W. ; Perez, F. ; Riza, N.A. ; de Rooij, Nico
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ., Switzerland
Abstract :
Arrays of sixteen micromirrors featuring 1 μm-wide structures have been fabricated based on SOI technology. Assembled prototypes can be actuated at about 70 V. Tilt angles, surface flatness, and some optical data of certain mirrors are measured.
Keywords :
electrostatic actuators; microassembling; micromirrors; optical arrays; optical attenuators; optical fabrication; optical variables measurement; silicon-on-insulator; 1 mum; SOI technology; digital variable optical attenuator; micromirrors; optical fabrication; optical measurement; Assembly; Attenuation measurement; Electrodes; Mirrors; Optical attenuators; Optical device fabrication; Optical fiber networks; Optical sensors; Power amplifiers; Stimulated emission;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233493
