High positioning accuracy of a dual-axis feeding system enhanced by using error compensation methods for UV laser processing system

Precision motion stage was an important component for the instrument control system, especially applied in the advanced manufacturing and inspecting systems. This article presented the positioning accuracy of a dual-axis feeding system enhanced by using a laser interferometer for error measurement and compensation. Based on a least-square theorem, one dimensional fitting function was used to compensate dual-axis error values. After the compensation experiments of 1 mm measured interval, the positioning accuracy of X- and Y-axis feeding system increased from 11.5 μm to 5.7 μm and from 26.2 μm to 3.4 μm, respectively. Moreover, the positioning accuracy of X- and Y-axis feeding system with the measured interval of 10 mm increased from 9.9 μm to 5.5 μm and from 24.7 μm to 1.6 μm, respectively. By using this approach, the positioning accuracy was enhanced to 44.4 % and 87 % in X- and Y-axis moving stage, respectively.