DocumentCode
2094218
Title
A low-voltage three-axis electromagnetically actuated micromirror for high coupling efficiency
Author
Cho, Il-Joo ; Yoon, Euisik
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea
fYear
2003
fDate
18-21 Aug. 2003
Firstpage
123
Lastpage
124
Abstract
A new three-axis electromagnetically-actuated micromirror using an SOI wafer is proposed and fabricated. This micromirror can be used for optical switches, optical scanners and alignment modules with low voltage operation and high coupling efficiency due to three degrees of freedom.
Keywords
electromagnetic actuators; micromirrors; optical couplers; optical design techniques; optical fabrication; silicon-on-insulator; SOI wafer; Si; alignment modules; coupling efficiency; electromagnetic actuation; low voltage operation; micromirror; optical scanners; optical switches; three degrees of freedom; Actuators; Coils; Electromagnetic coupling; Gold; Light sources; Magnetic field measurement; Micromirrors; Mirrors; Optical devices; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN
0-7803-7830-X
Type
conf
DOI
10.1109/OMEMS.2003.1233497
Filename
1233497
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