• DocumentCode
    2094298
  • Title

    Electrostatic actuation of 3-D MEMS mirrors by sidewall electrodes

  • Author

    Chu, Peter ; Shi-Sheng Lee ; Peale, D. ; Bonadeo, N. ; Brener, Igal

  • fYear
    2003
  • fDate
    18-21 Aug. 2003
  • Firstpage
    129
  • Lastpage
    130
  • Abstract
    We have successfully demonstrated sidewall-electrode actuation of 3-D MEMS mirrors. Improved actuation linearity and reduction of the spring-softening effect are achieved. Sidewall actuation enables better mirror dynamics including large snap-down angles, reduced driving voltages, and fast switching times.
  • Keywords
    electrodes; electrostatic actuators; micromirrors; microswitches; optical switches; 3-D MEMS mirrors; electrostatic actuation; mirror dynamics; sidewall actuation; sidewall electrodes; spring-softening effect; switching; Electrodes; Electrostatic actuators; Linearity; Micromechanical devices; Mirrors; Optical sensors; Resonance; Resonant frequency; Torque; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS, 2003 IEEE/LEOS International Conference on
  • Print_ISBN
    0-7803-7830-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2003.1233500
  • Filename
    1233500
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2094298