Title :
Low-loss 1 × 2 MEMS optical switch with three degrees-of-freedom actuation
Author :
Hsiao-wen, Lee ; Wen-yi, Wu ; Zhi-cong, Shi ; Wu-zheng, Guo ; Yu-hui, Lee
Author_Institution :
Opto-Electronics & Syst. Labs., Ind. Technol. Res. Inst., Chutung, Taiwan
Abstract :
A low-loss 1 × 2 MEMS optical switch with novel three-degrees-of-freedom actuator is demonstrated. The actuator can achieve in-plane, out-of-plane, and rotational motion. Therefore, low-loss switching performance can be obtained through these flexible fine adjustments. 0.6 dB insertion loss with long-term repeatability as low as ±0.04 dB is demonstrated for over one million cycles, and switching speed as fast as 0.8 ms is achieved with 5-V drive.
Keywords :
electrostatic actuators; micro-optics; microswitches; optical losses; optical switches; optical testing; 0.6 dB; 0.8 ms; 1 × 2 MEMS optical switch; actuator; insertion loss; low-loss optical switch; low-loss switching performance; repeatability; three degrees-of-freedom actuation; Actuators; Arm; Bidirectional control; Insertion loss; Magnetic confinement; Micromechanical devices; Optical losses; Optical microscopy; Optical switches; Silicon;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233501
