Title :
GaAs-based microelectromechanical waveguide switches monolithically integrated with lasers and detectors
Author :
Cich, Michael J. ; Lopez, Gerry M. ; Tigges, Chris ; Spahn, Olga Blum
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
In this paper, the monolithic integration of edge-emitting lasers and detectors with MEMS waveguide switches is demonstrated. Fabrication issues, such as choice of materials and critical design dimensions are discussed. Details of device performance are also given.
Keywords :
III-V semiconductors; gallium arsenide; integrated optics; micro-optics; microsensors; microswitches; optical design techniques; optical fabrication; optical sensors; optical switches; optical waveguide components; quantum well lasers; semiconductor device testing; semiconductor quantum wells; GaAs; MEMS; design dimensions; detectors; device performance; edge-emitting lasers; monolithic integration; optical fabrication; waveguide switches; Etching; Gallium arsenide; Integrated optics; Laboratories; Micromechanical devices; Optical switches; Optical waveguides; Planar waveguides; Semiconductor waveguides; Waveguide lasers;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233504
