• DocumentCode
    2094487
  • Title

    Assembled MEMS VOA

  • Author

    Saini, R. ; Geisberger, A. ; Tsui, K. ; Nistorica, C. ; Ellis, M. ; Skidmore, G.

  • Author_Institution
    Zyvex Corp., Richardson, TX, USA
  • fYear
    2003
  • fDate
    18-21 Aug. 2003
  • Firstpage
    139
  • Lastpage
    140
  • Abstract
    Micromirrors are assembled onto actuator sockets using MEMS assembly techniques to realize a shutter and beam steering VOA. The shutter mirror moves more than 45 microns at 10.6 volts and the angular mirror rotates 4.85° at 8.32 volts.
  • Keywords
    beam steering; electrostatic actuators; microassembling; micromirrors; optical attenuators; 10.6 V; 8.32 V; MEMS assembly; actuator sockets; angular mirror; beam steering VOA; micromirrors; shutter VOA; shutter mirror; variable optical attenuators; Actuators; Assembly; Beam steering; Electrothermal effects; Micromechanical devices; Micromirrors; Mirrors; Optical attenuators; Optical interferometry; Sockets;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS, 2003 IEEE/LEOS International Conference on
  • Print_ISBN
    0-7803-7830-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2003.1233505
  • Filename
    1233505
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2094487