Title :
Assembled MEMS VOA
Author :
Saini, R. ; Geisberger, A. ; Tsui, K. ; Nistorica, C. ; Ellis, M. ; Skidmore, G.
Author_Institution :
Zyvex Corp., Richardson, TX, USA
Abstract :
Micromirrors are assembled onto actuator sockets using MEMS assembly techniques to realize a shutter and beam steering VOA. The shutter mirror moves more than 45 microns at 10.6 volts and the angular mirror rotates 4.85° at 8.32 volts.
Keywords :
beam steering; electrostatic actuators; microassembling; micromirrors; optical attenuators; 10.6 V; 8.32 V; MEMS assembly; actuator sockets; angular mirror; beam steering VOA; micromirrors; shutter VOA; shutter mirror; variable optical attenuators; Actuators; Assembly; Beam steering; Electrothermal effects; Micromechanical devices; Micromirrors; Mirrors; Optical attenuators; Optical interferometry; Sockets;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233505
