Title :
Electrostatic MEMS variable optical attenuator with folded micromirror
Author :
Lim, Tae-Sun ; Ji, Chang-Hyeon ; Oh, Chang-Hoon ; Yee, Youngjoo ; Bu, Jong Uk
Author_Institution :
MS Group, LG Electron. Inst. of Technol., Seoul, South Korea
Abstract :
A reflection type VOA with folded micromirror was designed and fabricated. The proposed mirror structure can reduce the size of device by parallel alignment of the two fibers. Lensed fibers are used for high coupling efficiency and ease of assembly. The initial insertion loss is about 0.6 dB and the maximum attenuation is about 30 dB. The switching time of the fabricated VOA is about 1 ms.
Keywords :
electrostatic actuators; lenses; micromirrors; optical attenuators; optical design techniques; optical fabrication; optical fibre couplers; optical fibre losses; optical switches; MEMS; VOA; coupling efficiency; electrostatic variable optical attenuator; folded micromirror; insertion loss; lensed fibers; optical design; optical fabrication; Assembly; Electrostatics; Insertion loss; Micromechanical devices; Micromirrors; Mirrors; Optical attenuators; Optical fiber devices; Optical losses; Optical reflection;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233507
