Title :
MEMS fiber-optic variable optical attenuator using collimating lensed fiber
Author :
Kim, Che-Heung ; Park, Jaehyoung ; Park, Namkyoo ; Kim, Yong-Kweon
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., South Korea
Abstract :
A reflective type MEMS VOA using lensed fiber-coupling scheme was fabricated. A linear bi-directional comb actuator is used to translate vertical mirror to improve attenuation characteristics in small attenuation range. Various coupling loss factors are analyzed by CODE V. The insertion loss of the fabricated VOA is 0.98 dB. The PDL measurement shows good uniformity in broad attenuation range. The maximum value of PDL is 0.24 dB. The wavelength dependency of VOA is measured below 0.7 dB in whole attenuation range and the return loss is -38 dB.
Keywords :
electrostatic actuators; lenses; micromirrors; optical attenuators; optical collimators; optical fabrication; optical fibre couplers; optical fibre losses; -38 dB; 0.9 dB; CODE V; MEMS; attenuation characteristics; bidirectional comb actuator; collimating lensed fiber; coupling loss; fiber-optic variable optical attenuator; insertion loss; lensed fiber-coupling scheme; optical fabrication; vertical mirror; Attenuation measurement; Bidirectional control; Hydraulic actuators; Micromechanical devices; Optical attenuators; Optical collimators; Optical fibers; Optical losses; Page description languages; Wavelength measurement;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233508
