Title :
Bi-directional movable latching structure using electrothermal V-beam actuators for optical switch application
Author :
Chen, Wen-Chih ; Wu, Chia-Yu ; Lee, Chengkuo
Author_Institution :
Asia Pacific Microsystems Inc., Hsinchu, Taiwan
Abstract :
We present a new bistable MEMS structure driven by a pair of electrothermal V-beam actuators with capability of bi-directional motion. The preliminary results enable its application possibility for optical switch.
Keywords :
micro-optics; microactuators; microswitches; optical bistability; optical design techniques; optical fabrication; optical switches; optical testing; MEMS; bidirectional latching structure; electrothermal V-beam actuators; movable latching structure; optical switch application; Actuators; Bidirectional control; Electrothermal effects; Micromechanical devices; Optical bistability; Optical design; Optical switches; Particle beam optics; Relays; Springs;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233510
