DocumentCode :
2094628
Title :
A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors
Author :
Hah, Dooyoung ; Choi, Chang-Auck ; Jun, Chi-Hoon ; Kim, Youn Tae
Author_Institution :
Basic Res. Lab., Electron. & Telecommun. Res. Inst., Daejeon, South Korea
fYear :
2003
fDate :
18-21 Aug. 2003
Firstpage :
151
Lastpage :
152
Abstract :
A self-aligned vertical comb-drive actuator fabricated using surface micromachining is presented. One- and two-axis tilt scanning micromirrors with the actuators were fabricated and tested. A mechanical tilt angle of ±1.4° at 66 VDC was achieved for a 1-mm-diameter micromirror.
Keywords :
electrostatic actuators; micromachining; micromirrors; optical design techniques; optical fabrication; optical scanners; optical testing; 1 mm; 66 V; mechanical tilt; optical fabrication; optical testing; scanning micromirrors; self-aligned vertical comb-drive actuator; surface micromachining; Actuators; Etching; Fabrication; Fingers; Micromachining; Micromirrors; Mirrors; Optical microscopy; Silicon on insulator technology; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
Type :
conf
DOI :
10.1109/OMEMS.2003.1233511
Filename :
1233511
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2094628
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