Title :
Characteristics of 1D and 2D optical scanning epi-Si-mirror devices
Author :
Liu, Chun-Kai ; Lee, Chengkuo ; Cheng, Chun Ren ; Huang, Yi-Mou ; Hung, Shih-Yun ; Huang, Ruey-Shing ; Lin, Min-Shyong
Author_Institution :
Asia Pacific Microsystems Inc., Hsinchu, Taiwan
Abstract :
A new process and experimental results of making optical scanning mirrors of large size and large deflection angle are presented. Characteristics of epitaxial Si mirrors with stepped vertical comb and thinned torsion springs are studied.
Keywords :
elemental semiconductors; micromechanical devices; micromirrors; optical design techniques; optical fabrication; optical scanners; optical testing; semiconductor epitaxial layers; silicon; torsion; 1D optical scanning mirror device; 2D optical scanning mirror device; Si; epitaxial Si mirrors; optical scanning mirrors; stepped vertical comb; thinned torsion springs; Actuators; Etching; Fingers; Frequency; Mirrors; Optical devices; Optical pulses; Pulse measurements; Springs; Wafer bonding;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233513
