DocumentCode
2094678
Title
Characteristics of 1D and 2D optical scanning epi-Si-mirror devices
Author
Liu, Chun-Kai ; Lee, Chengkuo ; Cheng, Chun Ren ; Huang, Yi-Mou ; Hung, Shih-Yun ; Huang, Ruey-Shing ; Lin, Min-Shyong
Author_Institution
Asia Pacific Microsystems Inc., Hsinchu, Taiwan
fYear
2003
fDate
18-21 Aug. 2003
Firstpage
155
Lastpage
156
Abstract
A new process and experimental results of making optical scanning mirrors of large size and large deflection angle are presented. Characteristics of epitaxial Si mirrors with stepped vertical comb and thinned torsion springs are studied.
Keywords
elemental semiconductors; micromechanical devices; micromirrors; optical design techniques; optical fabrication; optical scanners; optical testing; semiconductor epitaxial layers; silicon; torsion; 1D optical scanning mirror device; 2D optical scanning mirror device; Si; epitaxial Si mirrors; optical scanning mirrors; stepped vertical comb; thinned torsion springs; Actuators; Etching; Fingers; Frequency; Mirrors; Optical devices; Optical pulses; Pulse measurements; Springs; Wafer bonding;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN
0-7803-7830-X
Type
conf
DOI
10.1109/OMEMS.2003.1233513
Filename
1233513
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