DocumentCode
2094742
Title
Optical scanner prepared by wafer bending technique
Author
Ishimori, Masahiro ; Song, Jong-Hyeong ; Sasaki, Minoru ; Hane, Kazuhiro
Author_Institution
Dept. of Machine Intelligence & Syst. Eng., Tohoku Univ., Sendai, Japan
fYear
2003
fDate
18-21 Aug. 2003
Firstpage
159
Lastpage
160
Abstract
In this study, an optical scanner driven by the vertical comb drive actuator is prepared using the wafer bending technique. The device structure is presented, as well as the results of the measured mirror rotation angle, frequency characteristics and transient response.
Keywords
electrostatic actuators; micromirrors; optical fabrication; optical scanners; optical testing; device structure; frequency characteristics; mirror rotation angle; optical scanner; transient response; vertical comb drive actuator; wafer bending; Actuators; Machine intelligence; Microactuators; Micromechanical devices; Microstructure; Mirrors; Optical propagation; Resists; Systems engineering and theory; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN
0-7803-7830-X
Type
conf
DOI
10.1109/OMEMS.2003.1233515
Filename
1233515
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