Title :
Optical scanner prepared by wafer bending technique
Author :
Ishimori, Masahiro ; Song, Jong-Hyeong ; Sasaki, Minoru ; Hane, Kazuhiro
Author_Institution :
Dept. of Machine Intelligence & Syst. Eng., Tohoku Univ., Sendai, Japan
Abstract :
In this study, an optical scanner driven by the vertical comb drive actuator is prepared using the wafer bending technique. The device structure is presented, as well as the results of the measured mirror rotation angle, frequency characteristics and transient response.
Keywords :
electrostatic actuators; micromirrors; optical fabrication; optical scanners; optical testing; device structure; frequency characteristics; mirror rotation angle; optical scanner; transient response; vertical comb drive actuator; wafer bending; Actuators; Machine intelligence; Microactuators; Micromechanical devices; Microstructure; Mirrors; Optical propagation; Resists; Systems engineering and theory; Voltage;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233515
