Title :
Biaxial MEMS raster scanner with linear ramp drive
Author :
Urey, Hakan ; Sprague, Randy
Author_Institution :
KOC Univ., Istanbul, Turkey
Abstract :
A biaxial MEMS raster scanner is developed for laser scanning displays. We discuss microfabrication, packaging, and design aspects, and how to minimize power consumption and linearity error by optimizing the vertical scanner resonant frequency and drive waveform.
Keywords :
micro-optics; microassembling; micromechanical devices; optical design techniques; optical fabrication; optical scanners; packaging; waveform generators; biaxial MEMS raster scanner; design aspects; laser scanning displays; linear ramp drive; microfabrication; packaging; vertical scanner resonant frequency; Coils; Copper; Displays; Energy consumption; Glass; Magnets; Micromechanical devices; Mirrors; Packaging; Resonant frequency;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233516
