Title :
Wafer probing at W-band
Author :
Godshalk, Edward M.
Author_Institution :
Cascade Microtech Inc Beavenon, Oregon, USA.
Abstract :
A W-band (75-110 GHz) wafer probe is presented. The probe uses ridge-trough waveguide to transition from a rectangular waveguide input to coplanar waveguide used on the probe board output. Research was conducted on radiation loss and moding in coplanar waveguide to minimize insertion loss and maintain a coplanar mode. The probe is shown to work successfully and data is presented for W-band HEMTs.
Keywords :
Circuit testing; Coplanar waveguides; Insertion loss; MIMICs; Millimeter wave radar; Millimeter wave technology; Probes; Propagation losses; Rectangular waveguides; Waveguide transitions;
Conference_Titel :
Microwave Conference, 1993. 23rd European
Conference_Location :
Madrid, Spain
DOI :
10.1109/EUMA.1993.336726
