• DocumentCode
    2094907
  • Title

    New type of micro-mechanical shutter array for replacement of infrared photodetector arrays

  • Author

    Pizzi, Marco ; Koniachkine, Valerian ; De Martiis, Omar ; Marbach, Ralf

  • Author_Institution
    Centro Ricerche, Orbassano, Italy
  • fYear
    2003
  • fDate
    18-21 Aug. 2003
  • Firstpage
    173
  • Lastpage
    174
  • Abstract
    A new type of low-cost MEMS shutter array has become available that can be used as an alternative to photodetector arrays. The new MEMS array reduces part cost to a point where infrared sensing seems possible even in consumer-type applications.
  • Keywords
    infrared detectors; micro-optics; micromechanical devices; optical arrays; MEMS; infrared photodetector arrays; infrared sensing; micro-mechanical shutter array; Costs; Glass; Infrared detectors; Micromechanical devices; Optical arrays; Optical devices; Optical materials; Optical sensors; Photodetectors; Sensor arrays;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS, 2003 IEEE/LEOS International Conference on
  • Print_ISBN
    0-7803-7830-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2003.1233521
  • Filename
    1233521
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2094907