Title :
New type of micro-mechanical shutter array for replacement of infrared photodetector arrays
Author :
Pizzi, Marco ; Koniachkine, Valerian ; De Martiis, Omar ; Marbach, Ralf
Author_Institution :
Centro Ricerche, Orbassano, Italy
Abstract :
A new type of low-cost MEMS shutter array has become available that can be used as an alternative to photodetector arrays. The new MEMS array reduces part cost to a point where infrared sensing seems possible even in consumer-type applications.
Keywords :
infrared detectors; micro-optics; micromechanical devices; optical arrays; MEMS; infrared photodetector arrays; infrared sensing; micro-mechanical shutter array; Costs; Glass; Infrared detectors; Micromechanical devices; Optical arrays; Optical devices; Optical materials; Optical sensors; Photodetectors; Sensor arrays;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233521
