• DocumentCode
    2094915
  • Title

    Polarization interferometer for measuring small displacement

  • Author

    Liu, Xinqun ; Clegg, Warwick ; Jenkins, David ; Liu, Bo

  • Author_Institution
    Centre for Res. in Inf. Storage Technol., Plymouth Univ., UK
  • Volume
    2
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    729
  • Abstract
    A homodyne polarization laser interferometer is presented for high speed measurement of small displacements. No modulation technique is used, so the opto-mechanical set-up is relatively simple. The dual beam arrangement enables the displacement to be measured whilst the use of polarization interferometry enables the determination of the directional nature of the displacement. Another feature of this interferometer lies in the fact that it is also suitable for the measurement of head-media spacing of a hard disk drive. Combined with the electronics used at present, sub-nanometre resolution is achievable. Its measurement bandwidth is limited only by the sampling rate of the A/D board being used
  • Keywords
    displacement measurement; high-speed optical techniques; light interferometers; light polarisation; measurement by laser beam; A/D board; ADC sampling rate; dual beam arrangement; hard disk drive; head-media spacing; high speed measurement; homodyne polarization laser interferometer; measurement bandwidth limitation; polarization interferometry; small displacements; sub-nanometre resolution; Diode lasers; Displacement measurement; Laser beams; Mirrors; Optical interferometry; Optical polarization; Phase shifting interferometry; Sampling methods; Structural beams; Velocity measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Instrumentation and Measurement Technology Conference, 2000. IMTC 2000. Proceedings of the 17th IEEE
  • Conference_Location
    Baltimore, MD
  • ISSN
    1091-5281
  • Print_ISBN
    0-7803-5890-2
  • Type

    conf

  • DOI
    10.1109/IMTC.2000.848832
  • Filename
    848832