DocumentCode
2094915
Title
Polarization interferometer for measuring small displacement
Author
Liu, Xinqun ; Clegg, Warwick ; Jenkins, David ; Liu, Bo
Author_Institution
Centre for Res. in Inf. Storage Technol., Plymouth Univ., UK
Volume
2
fYear
2000
fDate
2000
Firstpage
729
Abstract
A homodyne polarization laser interferometer is presented for high speed measurement of small displacements. No modulation technique is used, so the opto-mechanical set-up is relatively simple. The dual beam arrangement enables the displacement to be measured whilst the use of polarization interferometry enables the determination of the directional nature of the displacement. Another feature of this interferometer lies in the fact that it is also suitable for the measurement of head-media spacing of a hard disk drive. Combined with the electronics used at present, sub-nanometre resolution is achievable. Its measurement bandwidth is limited only by the sampling rate of the A/D board being used
Keywords
displacement measurement; high-speed optical techniques; light interferometers; light polarisation; measurement by laser beam; A/D board; ADC sampling rate; dual beam arrangement; hard disk drive; head-media spacing; high speed measurement; homodyne polarization laser interferometer; measurement bandwidth limitation; polarization interferometry; small displacements; sub-nanometre resolution; Diode lasers; Displacement measurement; Laser beams; Mirrors; Optical interferometry; Optical polarization; Phase shifting interferometry; Sampling methods; Structural beams; Velocity measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Instrumentation and Measurement Technology Conference, 2000. IMTC 2000. Proceedings of the 17th IEEE
Conference_Location
Baltimore, MD
ISSN
1091-5281
Print_ISBN
0-7803-5890-2
Type
conf
DOI
10.1109/IMTC.2000.848832
Filename
848832
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