Micro-sized spectrometer based on a lamellar grating interferometer

Author

Manzardo, O. ; Michaely, R. ; Herzig, H.P.

Author_Institution

Inst. of Microtechnol., Neuchatel Univ., Switzerland

fYear

2003

fDate

18-21 Aug. 2003

Firstpage

175

Lastpage

176

Abstract

A lamellar grating interferometer (LGI) realized by silicon micro-machining is presented. The LGI is a binary grating with a variable depth. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon-on-insulator (SOI) technology. It is used as Fourier transform spectrometer (FTS). We have measured an optical path difference maximum of 82 μm. The measured resolution of the spectrometer after the phase correction is 6 nm at a wavelength of 633 nm. A preliminary measurement with a xenon arc lamp is shown.

Keywords

Fourier transform spectrometers; arc lamps; diffraction gratings; electrostatic actuators; elemental semiconductors; light interferometers; micro-optics; micromachining; optical fabrication; optical testing; silicon; silicon-on-insulator; 633 nm; Fourier transform spectrometer; SOI; Si; binary grating; electrostatic comb drive actuator; lamellar grating interferometer; microsized spectrometer; optical path difference; silicon micromachining; silicon-on-insulator technology; xenon arc lamp; Electrostatic actuators; Electrostatic measurements; Fourier transforms; Gratings; Optical interferometry; Phase measurement; Silicon on insulator technology; Spectroscopy; Wavelength measurement; Xenon;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2003 IEEE/LEOS International Conference on

Print_ISBN

0-7803-7830-X

Type

conf

DOI

10.1109/OMEMS.2003.1233522

Filename

1233522