Title :
Novel suspended small SiO2 ridge optical waveguides for optical sensing
Author :
Pengxin Chen ; Yunpeng Zhu ; Sailing He ; Daoxin Dai
Author_Institution :
State Key Lab. for Modern Opt. Instrum., Zhejiang Univ., Hangzhou, China
Abstract :
Novel suspended SiO2 ridge optical waveguides on silicon are fabricated and characterized. The propagation loss and the bend loss measured are about 0.385dB/cm and 0.037dB/90° respectively for the fabricated 1μm-wide waveguides with a bending radius of 100μm when operating at 1550 nm.
Keywords :
integrated optics; optical fabrication; optical losses; optical sensors; optical waveguides; ridge waveguides; silicon compounds; waveguide discontinuities; Si; SiO2; bending radius; optical sensing; propagation loss; ridge optical waveguides;
Conference_Titel :
Communications and Photonics Conference (ACP), 2012 Asia
Conference_Location :
Guangzhou
Print_ISBN :
978-1-4673-6274-0
