Title :
Measurements, FEM simulation and spice modeling of a Thermal Conductivity Detector
Author :
Rastrello, F. ; Placidi, P. ; Scorzoni, A. ; Cozzani, E. ; Messina, M. ; Elmi, I. ; Zampolli, S. ; Cardinali, G.C.
Author_Institution :
DIEI, Univ. of Perugia, Perugia, Italy
Abstract :
In this paper we present a micromachined Thermal Conductivity Detector (TCD), based on the Ultra Low Power (ULP) technology. The device has been electrically characterized with different Helium gas flows, via a microfluidic experimental setup. Extraction of global thermo-electric parameters, exploited for the development of an electro-thermal Spice model, has been performed directly from the experimental measurements and from 3-D electro-thermal FEM simulations of the device. The resulting Spice model agrees very well with the measurements, with a maximum error less than 0.22%.
Keywords :
SPICE; finite element analysis; flow measurement; gas sensors; helium; microfluidics; micromachining; thermal conductivity; thermoelectricity; 3d electro-thermal simulations; FEM; Helium gas flows; microfluidic; micromachining; spice modeling; thermal conductivity detector; thermo-electric parameters; ultra low power; Conductivity; Detectors; Finite element methods; Mathematical model; Resistance; Solid modeling; Thermal conductivity; Gas Sensor; Microfluidic setup; Micromachining; Multiphysics Modeling; TCD; Thermal Conductivity Detector; ULP; Ultra Low Power;
Conference_Titel :
Instrumentation and Measurement Technology Conference (I2MTC), 2011 IEEE
Conference_Location :
Binjiang
Print_ISBN :
978-1-4244-7933-7
DOI :
10.1109/IMTC.2011.5944118
