Title :
Substrate resistance extraction using a multi-domain surface integral formulation
Author :
Vithayathil, Anne ; Hu, Xin ; White, Jacob
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA
Abstract :
In order to assess and optimize layout strategies for minimizing substrate noise, it is necessary to have fast and accurate techniques for computing contact coupling resistances associated with the substrate. In this paper, we describe an extraction method capable of full-chip analysis which combines modest geometric approximations, a novel integral formulation, and an FFT-accelerated preconditioned iterative method.
Keywords :
contact resistance; iterative methods; semiconductor device models; semiconductor device noise; surface resistance; FFT-accelerated preconditioned iterative method; computing contact coupling resistances; extraction method; full-chip analysis; geometric approximations; layout strategies; minimizing substrate noise; multi-domain surface integral formulation; substrate resistance extraction; Computer science; Conductivity; Electric potential; Geometry; Integral equations; Iterative methods; Nonhomogeneous media; Slabs; Substrates; Surface resistance;
Conference_Titel :
Simulation of Semiconductor Processes and Devices, 2003. SISPAD 2003. International Conference on
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7826-1
DOI :
10.1109/SISPAD.2003.1233702
